SIZE MEASUREMENT OF LASER-INDUCED DAMAGE IN LARGE-APERTURE FINAL OPTICS

Size Measurement of Laser-Induced Damage in Large-Aperture Final Optics

Size Measurement of Laser-Induced Damage in Large-Aperture Final Optics

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In this paper, a hierarchical kernel extreme learning machine (HK-ELM) is proposed to solve the problem that the size of laser-induced damage (LID) cannot be accurately measured under the condition of inhomogeneous total internal reflection illumination.The proposed method overcomes the limitations of the radiometric method, which depends on a single factor to measure the size of damage.After Car Coaster analyzing the light scattering characteristics of LID with the finite-difference time-domain method, we find that we should consider the influences of multiple factors when measuring the size of damage under the condition of uneven illumination.The experimental results show that HK-ELM can achieve ultra-resolution measurements, and the mean relative error of the measured size predicted by HK-ELM is within Fire Table 5% on the testing samples.Compared with the traditional technology, the method proposed in this paper effectively improves the measurement accuracy.

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